Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
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| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Linkoping, Sweden :
Linkoping University,
2014.
|
| Series: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Subjects: | |
| Online Access: | Click to View |
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| 100 | 1 | |a Yazdanfar, Milan, |e author. | |
| 245 | 1 | 0 | |a Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / |c Milan Yazdanfar. |
| 264 | 1 | |a Linkoping, Sweden : |b Linkoping University, |c 2014. | |
| 264 | 4 | |c 2014 | |
| 300 | |a 1 online resource (63 pages) : |b illustrations. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 490 | 1 | |a Linkoping Studies in Science and Technology Dissertations, |x 0345-7524 ; |v Number 1625 | |
| 504 | |a Includes bibliographical references. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed October 22, 2014). | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Silicon carbide |x Research. | |
| 655 | 4 | |a Electronic books. | |
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| 830 | 0 | |a Linkoping studies in science and technology. |p Dissertations ; |v Number 1625. | |
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