Sputtering materials for VLSI and thin film devices /
I tiakina i:
| Kaituhi matua: | |
|---|---|
| Hōputu: | Tāhiko īPukapuka |
| Reo: | Ingarihi |
| I whakaputaina: |
Oxford ; Boston :
William Andrew Publishing,
2014.
|
| Putanga: | First edition. |
| Ngā marau: | |
| Urunga tuihono: | An electronic book accessible through the World Wide Web; click to view |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
|
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