Sputtering materials for VLSI and thin film devices /
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| Hovedforfatter: | |
|---|---|
| Format: | Electronisk eBog |
| Sprog: | engelsk |
| Udgivet: |
Oxford ; Boston :
William Andrew Publishing,
2014.
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| Udgivelse: | First edition. |
| Fag: | |
| Online adgang: | An electronic book accessible through the World Wide Web; click to view |
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