Silicon technologies ion implantation and thermal treatment /
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
No Tags, Be the first to tag this record!
|
Similar Items: Silicon technologies
- Proceedings of the 10th Asian Conference on Solid State Ionics advanced materials for emerging technologies : Kandy, Sri Lanka, 12-16 June 2006 /
- Semiconductor materials an introduction to basic principles /
- Characterizations of as grown and functionalized epitaxial graphene grown on SiC surfaces /
- MOCVD growth of GaN-based high electron mobility transistor structures /
- MOCVD growth of GaN-based high electron mobility transistor structures /
- Nitride semiconductor devices fundamentals and applications /