Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /
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| Institution som forfatter: | |
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| Andre forfattere: | |
| Format: | Electronisk eBog |
| Sprog: | engelsk |
| Udgivet: |
Weinheim [Germany] :
Wiley,
2013.
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| Fag: | |
| Online adgang: | An electronic book accessible through the World Wide Web; click to view |
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Lignende værker: Enabling technologies for MEMS and nanodevices
- Microelectromechanical systems advanced materials and fabrication methods /
- Hermeticity testing of MEMS and microelectronic packages /
- Microelectronics, microsystems and nanotechnology papers presented at MMN 2000, Athens, Greece, 20-22 November 2000 /
- Inkjet-based micromanufacturing
- Future trends in microelectronics : Journey into the unknown /
- Advanced micro-device engineering IV : selected, peer reviewed papers from the 4th International Conference on Advanced Micro-Device Engineering (AMDE 2012), December 7, 2012, Kiryu City Performing Arts Center, Kiryu, Japan /