Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /

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Bibliografiska uppgifter
Institutionellt upphov:	ebrary, Inc
Övriga upphov:	Baltes, Henry
Materialtyp:	Elektronisk E-bok
Språk:	engelska
Utgiven:	Weinheim [Germany] : Wiley, 2013.
Ämnen:	Microelectronics. Nanotechnology. Microelectromechanical systems. Electronic books.
Länkar:	An electronic book accessible through the World Wide Web; click to view
Taggar:	Lägg till en tagg Inga taggar, Lägg till första taggen!

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007	cr cn\|\|\|\|\|\|\|\|\|
008	130422s2013 gw a sb 001 0 eng d
020			\|z 9783527334988
020			\|z 9783527675043 (e-book)
035			\|a (CaPaEBR)ebr10683273
035			\|a (OCoLC)846963169
040			\|a CaPaEBR \|c CaPaEBR
050	1	4	\|a TK7874 \|b .E53 2013eb
245	0	0	\|a Enabling technologies for MEMS and nanodevices \|h [electronic resource] : \|b advanced micro and nanosystems / \|c edited by Henry Baltes ... [et al.].
260			\|a Weinheim [Germany] : \|b Wiley, \|c 2013.
300			\|a xii, 427 p. : \|b ill.
504			\|a Includes bibliographical references and index.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2013. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Microelectronics.
650		0	\|a Nanotechnology.
650		0	\|a Microelectromechanical systems.
655		7	\|a Electronic books. \|2 local
700	1		\|a Baltes, Henry.
710	2		\|a ebrary, Inc.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10683273 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 156978 \|d 156978