Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /

Saved in:

Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Baltes, Henry
Format:	Electronic eBook
Language:	English
Published:	Weinheim [Germany] : Wiley, 2013.
Subjects:	Microelectronics. Nanotechnology. Microelectromechanical systems. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet