ebrary, Inc, & Baltes, H. (2013). Enabling technologies for MEMS and nanodevices: Advanced micro and nanosystems. Wiley.
Chicago-čujuhus (17. p.)ebrary, Inc, juo Henry Baltes. Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems. Weinheim [Germany]: Wiley, 2013.
MLA-čujuhus (9. p.)ebrary, Inc, juo Henry Baltes. Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems. Wiley, 2013.
Muitte dárkkistit čujuhemiid riektatvuođa, ovdal go geavahat daid iežat deavsttas.