Microelectromechanical systems advanced materials and fabrication methods /
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| Collectivités auteurs: | , |
|---|---|
| Format: | Électronique eBook |
| Langue: | anglais |
| Publié: |
Washington, DC :
National Academy Press,
1997.
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| Sujets: | |
| Accès en ligne: | An electronic book accessible through the World Wide Web; click to view |
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