Tohutoro APA (7th ed.)
National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems & ebrary, Inc. (1997). Microelectromechanical systems: Advanced materials and fabrication methods. National Academy Press.
Tohutoru Kātū Chicago (17th ed.)
National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems me Inc ebrary. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: National Academy Press, 1997.
Tohutoro MLA (9th ed.)
National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems me Inc ebrary. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. National Academy Press, 1997.
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