National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems & ebrary, Inc. (1997). Microelectromechanical systems: Advanced materials and fabrication methods. National Academy Press.
芝加哥风格引文National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems 与 Inc ebrary. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. Washington, DC: National Academy Press, 1997.
MLA引文National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems 与 Inc ebrary. Microelectromechanical Systems: Advanced Materials and Fabrication Methods. National Academy Press, 1997.