Microelectromechanical systems advanced materials and fabrication methods /
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| Corporate Authors: | , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Washington, DC :
National Academy Press,
1997.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 050 | 1 | 4 | |a TK7874 |b .N333 1997eb |
| 082 | 0 | 4 | |a 621.381 |2 21 |
| 110 | 2 | |a National Research Council (U.S.). |b Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. | |
| 245 | 1 | 0 | |a Microelectromechanical systems |h [electronic resource] : |b advanced materials and fabrication methods / |c Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| 260 | |a Washington, DC : |b National Academy Press, |c 1997. | ||
| 300 | |a xiv, 61 p. : |b ill. | ||
| 504 | |a Includes bibliographical references (p. 51-55). | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2009. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Microelectromechanical systems |x Design and construction. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 710 | 2 | |a ebrary, Inc. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10055038 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 60782 |d 60782 | ||