Handbook of 3D integration. Volume 3, 3D process technology /

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Bibliografski detalji
Daljnji autori:	Garrou, Philip (Urednik), Koyanagi, Mitsumasa (Urednik), Ramm, Peter (Urednik), Allen, Ricky (Doprinositelj)
Format:	Elektronički e-knjiga
Jezik:	engleski
Izdano:	Weinheim, Germany : Wiley-VCH, 2014.
Teme:	Integrated circuits. Integrated circuits > Design and construction. Silicon. Three-dimensional imaging. Electronic books.
Online pristup:	An electronic book accessible through the World Wide Web; click to view
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