Handbook of 3D integration. Volume 3, 3D process technology /

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Bibliographic Details
Other Authors:	Garrou, Philip (Editor), Koyanagi, Mitsumasa (Editor), Ramm, Peter (Editor), Allen, Ricky (Contributor)
Format:	Electronic eBook
Language:	English
Published:	Weinheim, Germany : Wiley-VCH, 2014.
Subjects:	Integrated circuits. Integrated circuits > Design and construction. Silicon. Three-dimensional imaging. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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Description
Physical Description:	1 online resource (475 pages) : illustrations (some color)
Bibliography:	Includes bibliographical references at the end of each chapters and index.
ISBN:	9783527670130 (e-book) 9783527670123 (e-book) 9783527670116 (e-book) 9783527670109 (e-book)

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