CVD solutions for new directions in SiC and GaN epitaxy /
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| Главный автор: | |
|---|---|
| Формат: | Электронный ресурс eКнига |
| Язык: | английский |
| Опубликовано: |
Linkoping, Sweden :
Semiconductor Materials Division Department of Physics, Chemistry and Biology (IFM), Linkoping University,
2015.
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| Серии: | Linkoping studies in science and technology. Dissertations ;
Number 1654. |
| Предметы: | |
| Online-ссылка: | Click to View |
| Метки: |
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