Handbook of 3D integration. Volume 3, 3D process technology /
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Other Authors: | , , , |
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Format: | Electronic eBook |
Language: | English |
Published: |
Weinheim, Germany :
Wiley-VCH,
2014.
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Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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Physical Description: | 1 online resource (475 pages) : illustrations (some color) |
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Bibliography: | Includes bibliographical references at the end of each chapters and index. |
ISBN: | 9783527670130 (e-book) 9783527670123 (e-book) 9783527670116 (e-book) 9783527670109 (e-book) |