Handbook of 3D integration. Volume 3, 3D process technology /
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| Other Authors: | , , , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim, Germany :
Wiley-VCH,
2014.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 020 | |z 9783527334667 | ||
| 020 | |a 9783527670130 (e-book) | ||
| 020 | |a 9783527670123 (e-book) | ||
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| 050 | 1 | 4 | |a TK7874 |b .H363 2014eb |
| 082 | 0 | 4 | |a 621.3815 |2 23 |
| 245 | 0 | 0 | |a Handbook of 3D integration. |n Volume 3, |p 3D process technology / |c edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm ; Richard A. Allen [and sixty others], contributors. |
| 264 | 1 | |a Weinheim, Germany : |b Wiley-VCH, |c 2014. | |
| 264 | 4 | |c ©2014 | |
| 300 | |a 1 online resource (475 pages) : |b illustrations (some color) | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 504 | |a Includes bibliographical references at the end of each chapters and index. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed May 5, 2014). | ||
| 590 | |a Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Integrated circuits. | |
| 650 | 0 | |a Integrated circuits |x Design and construction. | |
| 650 | 0 | |a Silicon. | |
| 650 | 0 | |a Three-dimensional imaging. | |
| 655 | 0 | |a Electronic books. | |
| 700 | 1 | |a Garrou, Philip, |e editor. | |
| 700 | 1 | |a Koyanagi, Mitsumasa, |e editor. | |
| 700 | 1 | |a Ramm, Peter, |e editor. | |
| 700 | 1 | |a Allen, Ricky, |e contributor. | |
| 776 | 0 | 8 | |i Print version: |t Handbook of 3D integration. Volume 3, 3D process technology. |d Weinheim, Germany : Wiley-VCH, c2014 |h xxii, 451 pages |z 9783527334667 |
| 797 | 2 | |a ebrary. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10865387 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 172519 |d 172519 | ||