Fundamental principles of optical lithography the science of microfabrication /

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Bibliographic Details
Main Author:	Mack, Chris A.
Corporate Author:	ebrary, Inc
Format:	Electronic eBook
Language:	English
Published:	Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.
Subjects:	Integrated circuits > Design and construction. Microlithography > Industrial applications. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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