Lithography main techniques /

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...

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Coauteur: ebrary, Inc
Andere auteurs: Landis, Stefan
Formaat: Elektronisch E-boek
Taal:Engels
Gepubliceerd in: London : Hoboken, N.J. : ISTE ; Wiley, 2011.
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Online toegang:An electronic book accessible through the World Wide Web; click to view
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Lithography main techniques /

Gepubliceerd in 2011.
An electronic book accessible through the World Wide Web; click to view
Elektronisch E-boek