Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
Zapisane w:
| Korporacja: | |
|---|---|
| Kolejni autorzy: | |
| Format: | Elektroniczne E-book |
| Język: | angielski |
| Wydane: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
|
| Hasła przedmiotowe: | |
| Dostęp online: | An electronic book accessible through the World Wide Web; click to view |
| Etykiety: |
Nie ma etykietki, Dołącz pierwszą etykiete!
|
| Streszczenie: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
|---|---|
| Deskrypcja: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| Opis fizyczny: | xxv, 377 p. : ill. (some col.) |
| Bibliografia: | Includes bibliographical references and index. |