Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
Gardado en:
| Autor Corporativo: | |
|---|---|
| Outros autores: | |
| Formato: | Electrónico eBook |
| Idioma: | inglés |
| Publicado: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
|
| Subjects: | |
| Acceso en liña: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
Sen Etiquetas, Sexa o primeiro en etiquetar este rexistro!
|
| Summary: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
|---|---|
| descrición da copia: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| Descrición Física: | xxv, 377 p. : ill. (some col.) |
| Bibliografía: | Includes bibliographical references and index. |