Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
Gorde:
| Erakunde egilea: | |
|---|---|
| Beste egile batzuk: | |
| Formatua: | Baliabide elektronikoa eBook |
| Hizkuntza: | ingelesa |
| Argitaratua: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| Gaiak: | |
| Sarrera elektronikoa: | An electronic book accessible through the World Wide Web; click to view |
| Etiketak: |
Etiketa erantsi
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| 005 | 20171002063305.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 101013s2011 enka sb 001 0 eng d | ||
| 010 | |z 2010040731 | ||
| 020 | |z 9781848212022 (hardback) | ||
| 020 | |z 184821202X (hardback) | ||
| 020 | |z 9781118621233 (e-book) | ||
| 035 | |a (CaPaEBR)ebr10671590 | ||
| 035 | |a (OCoLC)842854719 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7872.M3 |b L58 2011eb |
| 082 | 0 | 4 | |a 621.3815/31 |2 22 |
| 245 | 0 | 0 | |a Lithography |h [electronic resource] : |b main techniques / |c edited by Stefan Landis. |
| 260 | |a London : |b ISTE ; |a Hoboken, N.J. : |b Wiley, |c 2011. | ||
| 300 | |a xxv, 377 p. : |b ill. (some col.) | ||
| 500 | |a Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 520 | |a "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |c Provided by publisher. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microlithography. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Landis, Stefan. | |
| 710 | 2 | |a ebrary, Inc. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10671590 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 154950 |d 154950 | ||