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Computational lithography

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Bibliográfalaš dieđut
Váldodahkki:	Ma, Xu, 1983-
Searvvušdahkki:	ebrary, Inc
Eará dahkkit:	Arce, Gonzalo R.
Materiálatiipa:	Elektrovnnalaš E-girji
Giella:	eaŋgalasgiella
Almmustuhtton:	Oxford : Wiley-Blackwell, 2010.
Ráidu:	Wiley series in pure and applied optics.
Fáttát:	Microlithography > Mathematics. Integrated circuits > Design and construction > Mathematics. Photolithography > Mathematics. Semiconductors > Etching > Mathematics. Resolution (Optics) Electronic books.
Liŋkkat:	An electronic book accessible through the World Wide Web; click to view
Fáddágilkorat:	Lasit fáddágilkoriid Eai fáddágilkorat, Lasit vuosttaš fáddágilkora!

Bearbmagovva

Computational lithography Dahkki Ma, Xu, 1983-

Almmustuhtton 2010.

An electronic book accessible through the World Wide Web; click to view

Elektrovnnalaš E-girji