Digital holography for MEMS and microsystem metrology

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Dettagli Bibliografici
Ente Autore:	ebrary, Inc
Altri autori:	Asundi, Anand
Natura:	Elettronico eBook
Lingua:	inglese
Pubblicazione:	Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011.
Serie:	Wiley microsystem and nanotechnology series.
Soggetti:	Microelectromechanical systems > Measurement. Microelectronics > Measurement. Holographic testing. Image processing > Digital techniques. Electronic books.
Accesso online:	An electronic book accessible through the World Wide Web; click to view
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