Fundamental principles of optical lithography the science of microfabrication /

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Bibliographic Details
Main Author:	Mack, Chris A.
Corporate Author:	ebrary, Inc
Format:	Electronic eBook
Language:	English
Published:	Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.
Subjects:	Integrated circuits > Design and construction. Microlithography > Industrial applications. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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100	1		\|a Mack, Chris A.
245	1	0	\|a Fundamental principles of optical lithography \|h [electronic resource] : \|b the science of microfabrication / \|c Chris Mack.
260			\|a Chichester, West Sussex, England ; \|a Hoboken, NJ, USA : \|b Wiley, \|c c2007.
300			\|a xvii, 515 p. : \|b ill.
504			\|a Includes bibliographical references and index.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2013. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Integrated circuits \|x Design and construction.
650		0	\|a Microlithography \|x Industrial applications.
655		7	\|a Electronic books. \|2 local
710	2		\|a ebrary, Inc.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10300846 \|z An electronic book accessible through the World Wide Web; click to view
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942	0	0	\|c EB
999			\|c 99011 \|d 99011