Mack, C. A. (2007). Fundamental principles of optical lithography: The science of microfabrication. Wiley.
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Citación estilo Chicago
Mack, Chris A. Fundamental Principles of Optical Lithography: The Science of Microfabrication. Chichester, West Sussex, England ; Hoboken, NJ, USA: Wiley, 2007.
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Cita MLA
Mack, Chris A. Fundamental Principles of Optical Lithography: The Science of Microfabrication. Wiley, 2007.
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