MEMS mechanical sensors
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boston :
Artech House,
c2004.
|
| Series: | Microelectromechanical systems series.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
No Tags, Be the first to tag this record!
|
Similar Items: MEMS mechanical sensors
- MEMS mechanical sensors
- Smart mems and sensor systems
- Smart mems and sensor systems
- Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
- Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
- Understanding MEMS : principles and applications /