MEMS mechanical sensors
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| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boston :
Artech House,
c2004.
|
| Series: | Microelectromechanical systems series.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 245 | 0 | 0 | |a MEMS mechanical sensors |h [electronic resource] / |c Stephen Beeby ... [et al. |
| 260 | |a Boston : |b Artech House, |c c2004. | ||
| 300 | |a x, 269 p. : |b ill. | ||
| 490 | 1 | |a Artech House microelectromechanical systems (MEMS) series | |
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2009. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Detectors. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Beeby, Stephen. | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a Microelectromechanical systems series. | |
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