Silicon technologies ion implantation and thermal treatment /
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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| Format: | Électronique eBook |
| Langue: | anglais |
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London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| Accès en ligne: | An electronic book accessible through the World Wide Web; click to view |
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Silicon technologies ion implantation and thermal treatment /
Publié 2011.
An electronic book accessible through the World Wide Web; click to view
Électronique
eBook