Atomic layer deposition principles, characteristics, and nanotechnology applications /

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Bibliographische Detailangaben
1. Verfasser:	Kaariainen, Tommi
Körperschaft:	ebrary, Inc
Format:	Elektronisch E-Book
Sprache:	Englisch
Veröffentlicht:	Hoboken, NJ : John Wiley & Sons, c2013.
Ausgabe:	2nd ed.
Schlagworte:	Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books.
Online-Zugang:	An electronic book accessible through the World Wide Web; click to view
Tags:	Tag hinzufügen Keine Tags, Fügen Sie das erste Tag hinzu!

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