Atomic layer deposition principles, characteristics, and nanotechnology applications /

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Bibliográfalaš dieđut
Váldodahkki:	Kaariainen, Tommi
Searvvušdahkki:	ebrary, Inc
Materiálatiipa:	Elektrovnnalaš E-girji
Giella:	eaŋgalasgiella
Almmustuhtton:	Hoboken, NJ : John Wiley & Sons, c2013.
Preanttus:	2nd ed.
Fáttát:	Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books.
Liŋkkat:	An electronic book accessible through the World Wide Web; click to view
Fáddágilkorat:	Lasit fáddágilkoriid Eai fáddágilkorat, Lasit vuosttaš fáddágilkora!

Geahča maid: Atomic layer deposition

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