Atomic layer deposition principles, characteristics, and nanotechnology applications /

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Bibliografske podrobnosti
Glavni avtor:	Kaariainen, Tommi
Korporativna značnica:	ebrary, Inc
Format:	Elektronski eKnjiga
Jezik:	angleščina
Izdano:	Hoboken, NJ : John Wiley & Sons, c2013.
Izdaja:	2nd ed.
Teme:	Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books.
Online dostop:	An electronic book accessible through the World Wide Web; click to view
Oznake:	Označite Brez oznak, prvi označite!

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