Atomic layer deposition principles, characteristics, and nanotechnology applications /

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Bibliographic Details
Main Author: Kaariainen, Tommi
Corporate Author: ebrary, Inc
Format: Electronic eBook
Language:English
Published: Hoboken, NJ : John Wiley & Sons, c2013.
Edition:2nd ed.
Subjects:
Online Access:An electronic book accessible through the World Wide Web; click to view
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Description
Physical Description:xv, 253 p. : ill.
Bibliography:Includes bibliographical references and index.