Atomic layer deposition principles, characteristics, and nanotechnology applications /

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Bibliographic Details
Main Author:	Kaariainen, Tommi
Corporate Author:	ebrary, Inc
Format:	Electronic eBook
Language:	English
Published:	Hoboken, NJ : John Wiley & Sons, c2013.
Edition:	2nd ed.
Subjects:	Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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007	cr cn\|\|\|\|\|\|\|\|\|
008	130422s2013 njua sb 001 0 eng d
010			\|z 2013016209
020			\|z 9781118062777 (cloth : alk. paper)
020			\|z 9781118747421 (ebook)
035			\|a (CaPaEBR)ebr10715316
035			\|a (OCoLC)841199237
040			\|a CaPaEBR \|c CaPaEBR
050	1	4	\|a TS695 \|b .K33 2013eb
082	0	4	\|a 620/.5 \|2 23
100	1		\|a Kaariainen, Tommi.
245	1	0	\|a Atomic layer deposition \|h [electronic resource] : \|b principles, characteristics, and nanotechnology applications / \|c Tommi Kaariainen ... [et al.].
250			\|a 2nd ed.
260			\|a Hoboken, NJ : \|b John Wiley & Sons, \|c c2013.
300			\|a xv, 253 p. : \|b ill.
504			\|a Includes bibliographical references and index.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2013. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Chemical vapor deposition.
650		0	\|a Epitaxy.
650		0	\|a Microelectronics.
650		0	\|a Nanotechnology.
655		7	\|a Electronic books. \|2 local
710	2		\|a ebrary, Inc.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10715316 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 159091 \|d 159091