Lithography principles, processes and materials /

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Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Hennessy, Theodore C.
Format:	Electronic eBook
Language:	English
Published:	New York : Nova Science, c2011.
Series:	Engineering tools, techniques and tables. Nanotechnology science and technology series.
Subjects:	Microlithography. Microfabrication. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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005	20171002063149.0
006	m u
007	cr cn\|\|\|\|\|\|\|\|\|
008	100820s2011 nyua sb 001 0 eng d
010			\|z 2010033078
020			\|z 1617618373 (hardcover)
020			\|z 9781611221237
020			\|z 9781617618376 (hardcover)
035			\|a (CaPaEBR)ebr10659070
035			\|a (OCoLC)726745731
040			\|a CaPaEBR \|c CaPaEBR
050	1	4	\|a TK7872.M3 \|b L58 2011eb
082	0	4	\|a 621.3815/31 \|2 22
245	0	0	\|a Lithography \|h [electronic resource] : \|b principles, processes and materials / \|c Theodore C. Hennessy, editor.
260			\|a New York : \|b Nova Science, \|c c2011.
300			\|a xii, 284 p. : \|b ill. (some col.).
490	1		\|a Engineering tools, techniques and tables
490	1		\|a Nanotechnology science and technology
504			\|a Includes bibliographical references and index.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2013. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Microlithography.
650		0	\|a Microfabrication.
655		7	\|a Electronic books. \|2 local
700	1		\|a Hennessy, Theodore C.
710	2		\|a ebrary, Inc.
830		0	\|a Engineering tools, techniques and tables.
830		0	\|a Nanotechnology science and technology series.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10659070 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 152989 \|d 152989