Lithography principles, processes and materials /
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| Corporate Author: | |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York :
Nova Science,
c2011.
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| Series: | Engineering tools, techniques and tables.
Nanotechnology science and technology series. |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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Add Tag | Physical Description: | xii, 284 p. : ill. (some col.). |
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| Bibliography: | Includes bibliographical references and index. |
Lithography main techniques /