Semiconductor strain metrology principles and applications /
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| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
[Saif Zone, Sharjah, U.A.E] ; Oak Park, IL :
Bentham Science,
[2012]
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 005 | 20171002062247.0 | ||
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| 007 | cr cn||||||||| | ||
| 008 | 120813s2012 ts a sb 001 0 eng d | ||
| 020 | |z 9781608053599 | ||
| 035 | |a (CaPaEBR)ebr10570978 | ||
| 035 | |a (OCoLC)811371628 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7871.85 |b .W65 2012eb |
| 100 | 1 | |a Wong, Terence K. S. | |
| 245 | 1 | 0 | |a Semiconductor strain metrology |h [electronic resource] : |b principles and applications / |c Terence K.S. Wong. |
| 260 | |a [Saif Zone, Sharjah, U.A.E] ; |a Oak Park, IL : |b Bentham Science, |c [2012] | ||
| 300 | |a 136 p. : |b ill. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2011. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Semiconductors |x Design and construction |x Materials. | |
| 650 | 0 | |a Compound semiconductors |x Design and construction |x Materials. | |
| 650 | 0 | |a Silicon-on-insulator technology. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 710 | 2 | |a ebrary, Inc. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10570978 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 139299 |d 139299 | ||