Computational lithography
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford :
Wiley-Blackwell,
2010.
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| Series: | Wiley series in pure and applied optics.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | xv, 226 p. : ill. |
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| Bibliography: | Includes bibliographical references and index. |