Handbook of silicon based MEMS materials and technologies
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| Corporate Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam ; Boston :
William Andrew/Elsevier,
2010.
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| Edition: | 1st ed. |
| Series: | Micro & nano technologies.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | xxxii, 636 p. : ill. |
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| Bibliography: | Includes bibliographical references and index. |