Analysis and design principles of MEMS devices
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| Autor principal: | |
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| Autor Corporativo: | |
| Formato: | Recurso Electrónico livro electrónico |
| Idioma: | inglês |
| Publicado em: |
Amsterdam ; Oxford :
Elsevier,
c2005.
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| Assuntos: | |
| Acesso em linha: | An electronic book accessible through the World Wide Web; click to view |
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