Plasma processing and processing science
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| Corporate Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Washington, D.C. :
National Academy Press,
1995.
|
| Series: | NRL strategic series.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 035 | |a (CaPaEBR)ebr10071430 | ||
| 035 | |a (OCoLC)58567010 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TA2020 |b .P5 1995eb |
| 082 | 0 | 4 | |a 621.044 |2 22 |
| 245 | 0 | 0 | |a Plasma processing and processing science |h [electronic resource] / |c Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| 260 | |a Washington, D.C. : |b National Academy Press, |c 1995. | ||
| 300 | |a x, 35 p. | ||
| 490 | 1 | |a NRL strategic series | |
| 500 | |a Committee chair: Francis F. Chen. | ||
| 500 | |a This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2009. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Plasma engineering. | |
| 650 | 0 | |a Semiconductors |x Etching. | |
| 650 | 0 | |a Plasma etching. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Chen, Francis F., |d 1929- | |
| 710 | 2 | |a National Research Council (U.S.). |b Panel on Plasma Processing. | |
| 710 | 2 | |a National Research Council (U.S.). |b Naval Studies Board. | |
| 710 | 2 | |a National Research Council (U.S.). |b Commission on Physical Sciences, Mathematics, and Applications. | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a NRL strategic series. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10071430 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 65906 |d 65906 | ||