Plasma processing of materials scientific opportunities and technological challenges /

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Bibliografiske detaljer
Corporate Authors:	National Research Council (U.S.). Panel on Plasma Processing of Materials, ebrary, Inc
Format:	Electronisk eBog
Sprog:	engelsk
Udgivet:	Washington, D.C. : National Academy Press, 1991.
Fag:	Plasma engineering. Microelectronics > Materials > Effect of radiation on. Surfaces (Technology) Electronic books.
Online adgang:	An electronic book accessible through the World Wide Web; click to view
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