Plasma processing of materials scientific opportunities and technological challenges /
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| Corporate Authors: | , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Washington, D.C. :
National Academy Press,
1991.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TA2005 |b .N37 1991eb |
| 082 | 0 | 4 | |a 621.044 |2 20 |
| 110 | 2 | |a National Research Council (U.S.). |b Panel on Plasma Processing of Materials. | |
| 245 | 1 | 0 | |a Plasma processing of materials |h [electronic resource] : |b scientific opportunities and technological challenges / |c Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. |
| 260 | |a Washington, D.C. : |b National Academy Press, |c 1991. | ||
| 300 | |a xii, 75 p. : |b ill. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Plasma engineering. | |
| 650 | 0 | |a Microelectronics |x Materials |x Effect of radiation on. | |
| 650 | 0 | |a Surfaces (Technology) | |
| 655 | 7 | |a Electronic books. |2 local | |
| 710 | 2 | |a ebrary, Inc. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10055392 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 61039 |d 61039 | ||