Plasma processing and processing science

Plasma processing and processing science

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Bibliographic Details
Corporate Authors: National Research Council (U.S.). Panel on Plasma Processing, National Research Council (U.S.). Naval Studies Board, National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications, ebrary, Inc
Other Authors: Chen, Francis F., 1929-
Format: Electronic eBook
Language:English
Published: Washington, D.C. : National Academy Press, 1995.
Series:NRL strategic series.
Subjects:
Plasma engineering.
Semiconductors > Etching.
Plasma etching.
Electronic books.
Online Access:An electronic book accessible through the World Wide Web; click to view
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Description
Item Description:Committee chair: Francis F. Chen.
This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
Physical Description:x, 35 p.

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