Lithography principles, processes and materials /
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| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York :
Nova Science,
c2011.
|
| Series: | Engineering tools, techniques and tables.
Nanotechnology science and technology series. |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 007 | cr cn||||||||| | ||
| 008 | 100820s2011 nyua sb 001 0 eng d | ||
| 010 | |z 2010033078 | ||
| 020 | |z 1617618373 (hardcover) | ||
| 020 | |z 9781611221237 | ||
| 020 | |z 9781617618376 (hardcover) | ||
| 035 | |a (CaPaEBR)ebr10659070 | ||
| 035 | |a (OCoLC)726745731 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7872.M3 |b L58 2011eb |
| 082 | 0 | 4 | |a 621.3815/31 |2 22 |
| 245 | 0 | 0 | |a Lithography |h [electronic resource] : |b principles, processes and materials / |c Theodore C. Hennessy, editor. |
| 260 | |a New York : |b Nova Science, |c c2011. | ||
| 300 | |a xii, 284 p. : |b ill. (some col.). | ||
| 490 | 1 | |a Engineering tools, techniques and tables | |
| 490 | 1 | |a Nanotechnology science and technology | |
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microlithography. | |
| 650 | 0 | |a Microfabrication. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Hennessy, Theodore C. | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a Engineering tools, techniques and tables. | |
| 830 | 0 | |a Nanotechnology science and technology series. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10659070 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 152989 |d 152989 | ||