Hermeticity testing of MEMS and microelectronic packages /

Hermeticity testing of MEMS and microelectronic packages /

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Bibliographic Details
Main Authors: Costello, Suzanne (Author), Desmulliez, Marc P. Y., 1963- (Author)
Format: Electronic eBook
Language:English
Published: Boston : Artech House, [2013]
Series:Artech House integrated microsystems series.
Subjects:
Microelectromechanical systems.
Microelectronics.
Microelectromechanical systems > Testing.
Microelectronics > Testing.
Electronic books.
Online Access:An electronic book accessible through the World Wide Web; click to view
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Table of Contents:
  • Machine generated contents note: References
  • pt. 1 Introduction to Hermetic Packages and Leak Types
  • 1.The Evolution of Packages, Their Sealing Methods, and Modes of Fabrication
  • 1.1.Introduction
  • 1.2.The Evolution of Microelectronics and MEMS Packages
  • 1.3.MEMS Sealing Techniques and Mode Package Fabrication
  • 1.3.1.Materials
  • 1.3.2.Sealing Techniques
  • 1.4.Summary of MEMS Packaging Materials and Techniques
  • References
  • 2.Assembly, Packaging, and Environmentally Induced Failures in MEMS
  • 2.1.Introduction
  • 2.2.Particle Contamination
  • 2.3.Thermomechanical Constraints
  • 2.3.1.Thermomechanical Constraints in Die Attach
  • 2.3.2.Thermomechanical Constraints in Package-Level Encapsulation
  • 2.3.3.Thermomechanical Constraints in Wafer-Level Encapsulation
  • 2.3.4.Thermomechanical Constraints in Flip-Chip Bonding
  • 2.4.Moisture and Gas Absorption
  • 2.4.1.Moisture Absorption
  • 2.4.2.Barrier Coatings: A Protection Against Moisture Absorption
  • 2.4.3.Outgassing
  • 2.5.Conclusions: Reliability Demonstration and Accelerated Testing
  • References
  • 3.Packaging Requirements for Hermeticity
  • 3.1.The Need for Hermeticity in MEMS and Microelectronics Packaging
  • 3.2.Balancing Maximum Permissive Leak Rate and Packaging Costs: The Quasi-Hermetic Package
  • References
  • 4.The Different Types of Leaks in MEMS and Microelectronics Packaging
  • 4.1.Introduction
  • 4.2.Leak Channels or Capillary Leaks
  • 4.3.Permeation
  • 4.4.Outgassing
  • 4.5.Conclusion
  • References
  • pt. 2 Traditional Hermeticity Test Techniques and Standards
  • 5.Ex Situ Hermeticity Test Methods
  • 5.1.Introduction
  • 5.2.Fine Leak Tests
  • 5.2.1.Helium Fine Leak Test
  • 5.2.2.Radioisotope Leak Detection Method
  • 5.3.Gross Leak Tests
  • 5.3.1.Fluorocarbon Liquid and Vapor Gross Leak Detection
  • 5.3.2.Gross Bubble Test
  • 5.3.3.Weight Gain
  • 5.3.4.Dye Penetrant Gross Leak Test
  • 5.4.Combinational Tests
  • 5.4.1.Optical Fine/Gross Leak Detection Method
  • 5.4.2.Cumulative Helium Leak Detection (CHLD) Method
  • References
  • 6.The History of Hermeticity Standards MIL-STD-883 T.M. 1014 and MIL-STD-750 T.M. 1071
  • 6.1.Introduction: The First Hermeticity Tests
  • 6.2.The Introduction of the Military Standards
  • 6.3.The First Problems with Traditional Hermeticity Tests and Standards
  • 6.4.Military Standard Revisions
  • 6.5.Summary
  • References
  • pt. 3 Limitations of Existing Hermeticity Test Methods in Low Volume Packages
  • 7.Permeation
  • 7.1.Introduction
  • 7.2.Mathematics of Permeation
  • 7.3.Limitations of the Packaging Material
  • 7.4.Conclusions
  • References
  • 8.Outgassing and Residual Gas Analysis (RGA)
  • 8.1.Outgassing
  • 8.2.Residual Gas Analysis
  • References
  • 9.Low-Cavity Volume Capillary Leak Limitations
  • 9.1.Limitations of the Helium Fine Leak Test Method
  • 9.1.1.Volume Limitations
  • 9.1.2.Minimum Detectable Leak Rate
  • References
  • pt. 4 Novel Methods of Leak Detection
  • 10.Q-Factor Monitoring of Resonant Microstructures as a Hermeticity Measurement Method
  • 10.1.Introduction
  • 10.2.Lumped Element Modeling of a Microresonator
  • 10.3.Definitions and Measurement Methods of the Quality Factor Q
  • 10.3.1.Definition in Terms of Stored Energy
  • 10.3.2.Definition in Terms of Bandwidth
  • 10.3.3.Determination of the Q-Factor by Amplitude-Frequency Measurement
  • 10.3.4.Determination of the Q-Factor by Phase Measurement
  • 10.4.Relation Between Pressure and Q-Factor
  • References
  • 11.In Situ Test Methods in Development
  • 11.1.Introduction
  • 11.2.Copper Test Structures
  • 11.3.Micro-Pirani Gauge
  • References
  • 12.Ex Situ Hermeticity Test Methods in Development
  • 12.1.Introduction
  • 12.2.FTIR Spectroscopy
  • 12.2.1.Application to Hermeticity
  • 12.2.2.Theoretical Limitations
  • 12.2.3.Practical Considerations
  • 12.2.4.Summary
  • 12.3.Raman Spectroscopy
  • 12.3.1.Application to the Hermeticity Test
  • 12.3.2.Theoretical Limitations
  • 12.3.3.Practical Considerations
  • 12.3.4.Summary
  • References
  • pt. 5 Conclusions and Vision
  • 13.Summary of Hermeticity Test Methods
  • 14.The Way Forward
  • 14.1.Introduction
  • 14.2.Improvement on Existing Techniques
  • 14.3.New Hermetic Materials and Hermeticity Test Methods
  • 14.4.Conclusions
  • References.

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