Hermeticity testing of MEMS and microelectronic packages /

Hermeticity testing of MEMS and microelectronic packages /

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Bibliographic Details
Main Authors: Costello, Suzanne (Author), Desmulliez, Marc P. Y., 1963- (Author)
Format: Electronic eBook
Language:English
Published: Boston : Artech House, [2013]
Series:Artech House integrated microsystems series.
Subjects:
Microelectromechanical systems.
Microelectronics.
Microelectromechanical systems > Testing.
Microelectronics > Testing.
Electronic books.
Online Access:An electronic book accessible through the World Wide Web; click to view
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Description
Physical Description:1 online resource (197 pages) : illustrations.
Bibliography:Includes bibliographical references and index.
ISBN:9781608075287 (e-book)

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