Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
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| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
|
| Series: | Nanotechnology science and technology series.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 007 | cr cn||||||||| | ||
| 008 | 091112s2010 nyuad sb 001 0 eng d | ||
| 010 | |z 2009044341 | ||
| 020 | |z 9781608764747 (hardcover : alk. paper) | ||
| 020 | |z 9781613246986 (e-book) | ||
| 035 | |a (CaPaEBR)ebr10671225 | ||
| 035 | |a (OCoLC)847626470 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7875 |b .M5284 2010eb |
| 082 | 0 | 4 | |a 621 |2 22 |
| 245 | 0 | 0 | |a Micro electro mechanical systems (MEMS) |h [electronic resource] : |b technology, fabrication processes and applications / |c Britt Ekwall and Mikkel Cronquist, editors. |
| 260 | |a Hauppauge, N.Y. : |b Nova Science Publishers, |c c2010. | ||
| 300 | |a xii, 391 p. : |b ill. (some col.). | ||
| 490 | 1 | |a Nanotechnology science and technology | |
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Ekwall, Britt. | |
| 700 | 1 | |a Cronquist, Mikkel. | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a Nanotechnology science and technology series. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10671225 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 154754 |d 154754 | ||