Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /

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Detalhes bibliográficos
Autor Corporativo:	ebrary, Inc
Outros Autores:	Ekwall, Britt, Cronquist, Mikkel
Formato:	Recurso Electrónico livro electrónico
Idioma:	inglês
Publicado em:	Hauppauge, N.Y. : Nova Science Publishers, c2010.
Colecção:	Nanotechnology science and technology series.
Assuntos:	Microelectromechanical systems. Electronic books.
Acesso em linha:	An electronic book accessible through the World Wide Web; click to view
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007	cr cn\|\|\|\|\|\|\|\|\|
008	091112s2010 nyuad sb 001 0 eng d
010			\|z 2009044341
020			\|z 9781608764747 (hardcover : alk. paper)
020			\|z 9781613246986 (e-book)
035			\|a (CaPaEBR)ebr10671225
035			\|a (OCoLC)847626470
040			\|a CaPaEBR \|c CaPaEBR
050	1	4	\|a TK7875 \|b .M5284 2010eb
082	0	4	\|a 621 \|2 22
245	0	0	\|a Micro electro mechanical systems (MEMS) \|h [electronic resource] : \|b technology, fabrication processes and applications / \|c Britt Ekwall and Mikkel Cronquist, editors.
260			\|a Hauppauge, N.Y. : \|b Nova Science Publishers, \|c c2010.
300			\|a xii, 391 p. : \|b ill. (some col.).
490	1		\|a Nanotechnology science and technology
504			\|a Includes bibliographical references and index.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2013. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Microelectromechanical systems.
655		7	\|a Electronic books. \|2 local
700	1		\|a Ekwall, Britt.
700	1		\|a Cronquist, Mikkel.
710	2		\|a ebrary, Inc.
830		0	\|a Nanotechnology science and technology series.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10671225 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 154754 \|d 154754