Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /

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Bibliographic Details
Corporate Author: ebrary, Inc
Other Authors: Ekwall, Britt, Cronquist, Mikkel
Format: Electronic eBook
Language:English
Published: Hauppauge, N.Y. : Nova Science Publishers, c2010.
Series:Nanotechnology science and technology series.
Subjects:
Online Access:An electronic book accessible through the World Wide Web; click to view
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Description
Physical Description:xii, 391 p. : ill. (some col.).
Bibliography:Includes bibliographical references and index.