ebrary, Inc, Ekwall, B., & Cronquist, M. (2010). Micro electro mechanical systems (MEMS): Technology, fabrication processes and applications. Nova Science Publishers.
Chicago-čujuhus (17. p.)ebrary, Inc, Britt Ekwall, juo Mikkel Cronquist. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications. Hauppauge, N.Y.: Nova Science Publishers, 2010.
MLA-čujuhus (9. p.)ebrary, Inc, et al. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications. Nova Science Publishers, 2010.
Muitte dárkkistit čujuhemiid riektatvuođa, ovdal go geavahat daid iežat deavsttas.