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Tohutoro APA (7th ed.)
ebrary, Inc, Ekwall, B., & Cronquist, M. (2010). Micro electro mechanical systems (MEMS): Technology, fabrication processes and applications. Nova Science Publishers.
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Tohutoru Kātū Chicago (17th ed.)
ebrary, Inc, Britt Ekwall, me Mikkel Cronquist. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications. Hauppauge, N.Y.: Nova Science Publishers, 2010.
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Tohutoro MLA (9th ed.)
ebrary, Inc, et al. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications. Nova Science Publishers, 2010.
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