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शिकागो शैली (17वां संस्करण) प्रशस्ति पत्रebrary, Inc, Britt Ekwall, और Mikkel Cronquist. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications. Hauppauge, N.Y.: Nova Science Publishers, 2010.
एमएलए (9वां संस्करण) प्रशस्ति पत्रebrary, Inc, et al. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications. Nova Science Publishers, 2010.
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