An introduction to microelectromechanical systems engineering

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Bibliographic Details
Main Author:	Maluf, Nadim
Corporate Author:	ebrary, Inc
Other Authors:	Williams, Kirt
Format:	Electronic eBook
Language:	English
Published:	Boston : Artech House, 2004.
Edition:	2nd ed.
Series:	Microelectromechanical systems series.
Subjects:	Microelectromechanical systems. Microtechnology. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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020			\|z 1580535909 (alk. paper)
035			\|a (CaPaEBR)ebr10081925
035			\|a (OCoLC)56123929
040			\|a CaPaEBR \|c CaPaEBR
050	1	4	\|a TK7875 \|b .M35 2004eb
082	0	4	\|a 621.381 \|2 22
100	1		\|a Maluf, Nadim.
245	1	3	\|a An introduction to microelectromechanical systems engineering \|h [electronic resource] / \|c Nadim Maluf, Kirt Williams.
250			\|a 2nd ed.
260			\|a Boston : \|b Artech House, \|c 2004.
300			\|a xx, 282 p. : \|b ill.
490	1		\|a Artech House microelectromechanical systems (MEMS) series
504			\|a Includes bibliographical references and index.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2009. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Microelectromechanical systems.
650		0	\|a Microtechnology.
655		7	\|a Electronic books. \|2 local
700	1		\|a Williams, Kirt.
710	2		\|a ebrary, Inc.
830		0	\|a Microelectromechanical systems series.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10081925 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 67472 \|d 67472