An introduction to microelectromechanical systems engineering
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boston :
Artech House,
2004.
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| Edition: | 2nd ed. |
| Series: | Microelectromechanical systems series.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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