An introduction to microelectromechanical systems engineering

An introduction to microelectromechanical systems engineering

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Bibliographic Details
Main Author: Maluf, Nadim
Corporate Author: ebrary, Inc
Other Authors: Williams, Kirt
Format: Electronic eBook
Language:English
Published: Boston : Artech House, 2004.
Edition:2nd ed.
Series:Microelectromechanical systems series.
Subjects:
Microelectromechanical systems.
Microtechnology.
Electronic books.
Online Access:An electronic book accessible through the World Wide Web; click to view
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Description
Physical Description:xx, 282 p. : ill.
Bibliography:Includes bibliographical references and index.

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